SPECS Engineers Install an Upgrade at the Leibniz Institute for Plasma Research and Technology

The Leibniz Institute for Plasma Research and Technology e.V. (INP) stands as the largest non-university research institution for low-temperature plasmas in Europe and a global leader in the field of physical plasmas, their fundamental principles and technological applications.

For over two decades, the INP has hosted a robust analysis system, recently expanded with state-of-the-art analytical technology. In a significant stride towards non-destructive exploration of the chemical composition of plasma-treated surfaces, SPECS has supplied an analysis system featuring a PHOIBOS 150 analyzer, 2D-CMOS detector, and µFOCUS 600 X-ray source.

The newly integrated X-ray Photoelectron Spectroscopy (XPS) system seamlessly fits into the existing 8" wafer handling transfer system, forming the core of an extensive Ultra High Vacuum (UHV) reactor cluster.

A standout aspect of this project was the highly customized integration of SPECS components into the existing cluster. Notably, a specially designed dome-shaped chamber and manipulator were seamlessly incorporated. These customer-specific additions were crucial in meeting the specific research requirements of the Leibniz Institute for Integrated Circuits, underscoring the flexibility and adaptability of the upgraded system.

We express our best wishes to the researchers at INP for continued success in their foundational research endeavors.