Gas Inlet System

PureGas is a modular gas handling system developed for applications such as NAP-SPM, NAP-XPS, catalysis or chemical vapor deposition, where a well-defined flow of ultra-pure gas is required. PureGas is all-metal sealed and fully Ultra High Vacuum (UHV) compatible as standard. Due to the modular design, a wide variety of different gases can be handled sequentially or in parallel.

Standard gas inlets are availbe for manual and automated gas supply.