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IQE 12 LE
Operation
Ion Current

>0.8 μA (Argon) at 125 μm spot

Ion Energy

10 eV - 5 keV

Operating Gases

Various

Scannable

yes

Working Principle

Extractor type

Applications

  • Depth profiling
  • Sample cleaning
  • Implantation
  • ISS

Required Accessories

Gas inlet

Optional Accessories

  • Wien mass filter
  • Piezo gas inlet system
  • Differential pumping system
  • Remote operation for depth profiling

Performance
Scan Range

10 x 10 mm2 at 23 mm working distance

Spot Size

125 μm at 23 mm working distance

Mounting
Insertion Depth

186 mm

Mounting Flange

DN38CF (2.75 ")

Power Supply

COSCON LSIS

Product details
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