| Energy Dispersion |
Hemisphere |
|
|
|
| Slits/Apertures |
8 Entrance, 3 Exit slits and Iris aperture |
|
|
|
| Magnetic Shielding |
Double µ-Metal Shielding |
|
|
|
| Lens Modes |
Angular Resolving, Transmission and Magnification (Lateral Resolved) Lens Modes |
|
|
|
| Kinetic Energy Range |
0 - 3500 eV |
|
|
|
| Pass Energies |
0 - 550 eV continously adjustable |
|
|
|
| Detector |
1D-DLD |
|
|
|
| Measurement Modes |
Snapshot mode, Sweeping mode, Fixed energy mode |
|
|
|
| Energy Window |
13% of Pass Energy |
|
|
|
| Electric Isolation |
up to 3.5 keV |
|
|
|
| Electronics |
HSA 3500 plus HT102 |
|
|
|
| Working Pressure |
up to 1 mbar (up to 10-4 mbar without nozzle) |
|
|
|
|
| Mounting Flange |
DN150 CF (8" OD) |
|
|
|
| Working Distance |
300 - 500 µm (for standard nozzle with 300 µm diameter) |
|
|
|
|
| Acceptance Angle |
±15° |
|
|
|
| Angular Resolution |
< 0.1° |
|
|
|
| Energy Resolution |
< 3 meV |
|
|
|
| Lateral Resolution |
< 100 µm |
|
|
|
| Smallest Acceptance Spot |
100 µm |
|
|
|
| XPS Count Rates UHV |
20 kcps* |
|
|
|
| XPS Count Rates 1 mbar |
16 kcps* |
|
|
|
| Detector Channels |
800 x 640 (with channel binning) |
|
|
|
| . |
* Ag 3d, FWHM < 0.85 eV, non-monochromatic X-ray source XR 50, Mg Kα anode, 300 W, N2 gas atmosphere |
|
|
|
|
Product Comparison