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PCS-RF-HO
Operation
Working Principle

Radio Frequency assisted plasma source
E-beam power

500 W max. at 13.56 MHz

(400W for oxygen and hydrogen)
Gas Flow Rate

< 0.1 sccm to 100 sccm (mode dependant)
Opteration Modes

Hybrid mode
Operating Pressure

< 10-7 - 10-5 mbar
Optional Accessories

Integrated shutter

Non standard lengths

Various aperture types

Differential pumping

Autotuning unit

Viewport

Plasma monitor

Plasma Control

Faraday Cup
Mounting
Insertion Depth

309 mm
Mounting Flange

NW63CF (4.5 ")
Performance
Spot Size

23 mm at source
Product details
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