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IQP 10/63
Performance
Ion Energy

2 - 6 keV

Ion Current

20 µA at 3 kV beam energy

Spot Size

4 - 20 mm (homogeneity of profile: 5 % withing 60 % of beam width) 

Beam current density

max. 150 µA/cm-2

Operation
Working Distance

30 - 500 mm

Operating Gases

noble gasses, O2, N2

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