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PCS-RF-IO
Operation
Working Principle

Radio Frequency assisted plasma source
E-beam power

500 W max. at 13.56 MHz

(400W for oxygen and hydrogen)
Gas Flow Rate

< 0.1 sccm to 100 sccm (mode dependant)
Operating Modes

Ion mode
Operating Pressure

< 10-7 - 10-5 mbar

Optional Accessories

Integrated shutter

Non standard lengths

Various aperture types

Differential pumping

Autotuning unit

Viewport

Plasma monitor

Plasma Control

Faraday Cup
Mounting
Mounting Flange

NW63CF (4.5 ")
Insertion Depth

309 mm
Performance
Spot Size

~23 mm at source
Product details
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