| Energy Dispersion |
Hemisphere |
|
|
|
| Slits/Apertures |
8 Entrance, 3 Exit slits and Iris aperture |
|
|
|
| Magnetic Shielding |
Double µ-Metal Shielding |
|
|
|
| Lens Modes |
Angular Resolving, Transmission and Magnification (Lateral Resolution) Lens Modes |
|
|
|
| Kinetic Energy Range |
0 - 7000 eV |
|
|
|
| Pass Energies |
0 - 550 eV continously adjustable |
|
|
|
| Detector |
2D-CCD/CMOS Detector |
|
|
|
| Measurement Modes |
Snapshot mode, Sweeping mode, Fixed energy mode |
|
|
|
| Energy Window |
13% of Pass Energy |
|
|
|
| Electric Isolation |
up to 7 keV |
|
|
|
| Electronics |
HSA 7000 plus |
|
|
|
| Working Pressure |
up to 30 mbar (higher pressure values achievable with corresponding nozzle diameters and differential pumping packages) |
|
|
|
|
| Acceptance Angle |
±22° |
|
|
|
| Angular Resolution |
< 0.7° |
|
|
|
| Energy Resolution |
< 20 meV |
|
|
|
| Lateral Resolution |
<20 μm (guaranteed) and <15 μm (achievable) with imaging lens module |
|
|
|
| Smallest Acceptance Spot |
Without imaging lens module the smallest acceptance spot is defined by the excitation spot of X-ray source or nozzle diameter |
|
|
|
| Detector Channels |
1900 x 1200 (with channel binning) |
|
|
|
| XPS Count Rates UHV |
70 kcps (guaranteed), 150 kcps (achievable) * |
|
|
|
| XPS Count Rates 10 mbar |
7 kcps (guaranteed), 15 kcps (achievable) * |
|
|
|
| XPS Count Rates 25 mbar |
0.5 kcps (guaranteed), 1.5 kcps (achievable) * |
|
|
|
| . |
* Ag 3d, FWHM < 0.85 eV, small spot monochromated X-ray source µ-FOCUS 600, Al Kα anode, 20 W, Spot size < 250 µm |
|
|
|
|
| Mounting Flange |
DN150 CF (8" OD) |
|
|
|
| Working Distance |
300 - 500 µm (for standard nozzle with 300 µm diameter) |
|
|
|
|
Product Comparison