µFOCUS 450

The µFOCUS 450 monochromator is equipped with a microfocus high performance X-ray source XR-MC which is specially designed for the use with the monochromator. This small spot source is equipped with Al anode in the standard configuration and two upgradable higher energies anodes (Ag, and Cr) for HAXPES capabilities. The µFOCUS 450 monochromator together with the XR-MC microfocus X-ray source is perfectly suited for small spot, high resolution, and high intensity XPS measurements. The X-ray monochromator operates according to Bragg´s Law of X-ray diffraction. Each wavelength of X-rays (Al Kα, Ag Lα, Cr Kα) is reflected from individually optimized crystals at a specific angle of reflection. For the Al and Ag anodes, quartz crystal are used, which have a 450 mm and 416 mm Rowland circle diameter respectively , whereas for Cr germanium crystals are used with a 676 mm Rowland circle. Due to its overall compactness, the µFOCUS 450 is suitable for mounting on almost any analysis chambers as a bolt-on component. Furthermore, being already equipped with a Si3N4 window, by using the differentially pumped NAP extension, the µFOCUS 450 allows to carry out XPS measurements under gas atmospheres of up to 50 mbar.