µ-FOCUS 600 NAP
Small Spot µ-FOCUS 600 X-Ray Monochromator for Near Ambient Pressure Applications
The small spot monochromator µ-FOCUS 500/600 NAP is developed for XPS measurements in near ambient pressure regime. The X-ray monochromator operates according to Bragg´s Law of X-ray diffraction. A single wavelength of X-rays is reflected from a quartz single crystal mirror at a specific angle of reflection. The mirror has a 500 mm Rowland circle diameter for µ-FOCUS 500 NAP and 600 mm for µ-FOCUS 600 NAP, respectively. Due to its overall compactness, the µ-FOCUS 500/600 NAP is suitable for mounting on almost any analysis chambers as a bolt-on component. By using the differentially pumped NAP extension with Si3N4 window, XPS measurements under gas atmospheres of up to 30 mbar can be carried out.
The µ-FOCUS 500/600 NAP monchromator is equipped with microfocus high performance X-ray source XR 50 MF which is specially designed for the use with the monochromator. This small spot source is equipped with Al anode. Thus, µ-FOCUS 500/600 NAP monochromator togeher with the XR 50 MF microfocus X-ray source is perfectly suited for small spot, high resolution and high intensity XPS measurements under NAP conditions.
KEY FEATURES
- Spot size on the sample: between 200 µm and 1 mm
- NAP extension with Si3N4 window for XPS measurements under gas atmospheres up to 30 mbar
- Monochromatic Al Kα excitation with high energy resolution
- High photon flux up to 1.9 x 1010 photons/s
- Rowland circle with 500/600 mm
- Pumping port for differential pumping
SPECIFICATIONS
Maximum Anode Voltage | 15 kV |
Dual Anode | n.a. |
Working Conditions | UHV and NAP |
Required Accessories | CCX 70 Isolation Unit Differential pumping Closed-Cycle Water Cooling System |
Optional Accessories | n.a. |
Monochromated | Yes |
Power | 180 W for Al anode |
Cross Talk | n.a. |
Photon Flux | 1.9 x 1010 photons/s |
Spot Size | variable spot size: 200 µm - 1 mm |
Insertion Depth | n.a. max. chamber port length for µ-FOCUS 500: 177 mm max. chamber port length for µ-FOCUS 600: 254 mm |
Anode Materials Available | Al anode |
Power Supply | UXC 1000 Universal X-Ray Source Control |
Mounting Flange | DN100 CF |
Rowland Cirlce Diameter | 500 mm for µ-FOCUS 500 NAP 600 mm for µ-FOCUS 600 NAP |