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IQE 11/35

Extractor type ion source optimized for sample cleaning.

The long-lived Yttrium coated iridium filament makes the source suitable for inert and reactive gases. In order to minimize the pressure increase, the gas is fed directly into the ionization chamber through a separate DN16CF flange. Typically, the pressure in the UHV chamber remains in the 10-5 to 10-6 mbar range during operation.
The IQE 11/35 generates an ion current of 10-15 µA (Argon) with a Gaussian beam profile. The beam diameter and current density depend on the source-to-sample distance, which can be optimized by choosing one of the standard insertion length (62.5 mm, 120 mm, 190 mm, 250 mm) or a customized length.
The source is bakeable up to 250° C and can be cleaned by internal "degassing".
For operation of the source, a digital COSCON IS power supply allows computer control in the higher energy range up to 5 kV.

KEY FEATURES

  • Suitable for reactive gases
  • High ion beam current optimized for sample cleaning
  • Compact and easy to handle
  • Long term stable operation
  • Excellent price/performance ratio
  • Fully digitalized power supply COSCON IS

MADE FOR THESE METHODS

1

SPECIFICATIONS

IQE 11/35
Operation
Ion Current

up to 20 μA (Argon)

Ion Energy

200 eV - 5 keV

Operating Gases

Various

Scannable

-

Working Principle

Extractor type

Applications

  • Sample cleaning
  • Implantation
Required Accessories

Gas inlet

Optional Accessories

-

Performance
Scan Range

-

Spot Size

< 5 mm at 30 mm working distance

Mounting
Insertion Depth

62.5 mm, 120 mm, 190 mm, 250 mm

Mounting Flange

DN35CF (2.75 ")

Power Supply

COSCON IS

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SPARE PARTS

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Product image
Product description
Article No.
 
Anode Cage for IQE 12/38, IQE 11/35, IQE 10/35

Anode cage for IQE 12/38, IQE 11/35, IQE 10/35

2055006853
Cathode for IQE 12/38 / IQE 11/35 / IQE 10/35

Cathode for IQE 12/38, IQE 11/35, IQE 10/35

2055014947
IQE 11 insulating ceramics, type 3011

Replacement ceramic for IQE11./35 Exchange together with 2027625206 recommended.

2027625105
IQE 11 insulating ceramics, type 3012

Replacement ceramic for IQE11/35. Exchange together with 2027625105 recommended.

2027625206
Membrane for VAT leak valve

Replacement membrane for VAT leak valve

2100010186
piezo actor

Replacement Piezo actor for SPECS Piezo Gas Inlet system

2060005909
variable leak valve DN16CF-R

New VAT leak valve

2060015126
SHV-Jumper Cable

Bridge cable for PU IQE 12/38, PU IQE 11/35

2060009307

DOWNLOADS

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