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FOCUS EFM 3i

The EFM 3 with its proprietary cooling concept has been the first commercial evaporator using an integrated flux monitor. Adds ion suppression to the classic EFM3 to prevent high energetic ions generating defects at the surface.

This device is a product of FOCUS GmbH. Further details can be found here: FOCUS EFM 3i

The EFM 3i is specifically designed to facilitate layer-by-layer growth in cases where it does not occur naturally. 

It allows for the controlled evaporation of the target material, and the simultaneous generation of ions to create additional surface defects (Ion-Beam-Assisted Deposition, IBAD).

The ions can be produced either by an intrinsic process from the evaporated target material, or from inert gases with the help of an integrated gas inlet. The ions are focused onto the substrate by an electro-static lens. This focusing lens can adjust the ratio of ions to neutrals within the deposition area at the target and hence the additionally induced defect density.

Alternatively sensitive substrate materials can be protected against ion bombardment by a repelling lens voltage (see EFM3s).

The dedicated EVC 300i power supply supports not only the evaporation process but also supplies the additional lens voltage and includes a sample current meter. 

Due to the special design of the ionization region the max. crucible size is limited.

See also: J.Kirschner, H. Engelhard, and D. Hartung, Rev. Sci. Instrum., Vol. 73, No. 11, p. 3853-3860, 2002.

KEY FEATURES

  • Evaporation area ø 4-20 mm
  • Flux monitor
  • Integrated shutter
  • Gas inlet for additional rare gas ions
  • Ion focusing lens for Ion-Beam-Assisted Deposition ( IBAD )
  • Ion suppression
  • Crucible capacity up to about 300 mm3
  • Mounting flange NW 35 CF
  • All other features same as EFM 3

MADE FOR THESE METHODS

1

SPECIFICATIONS

FOCUS EFM 3i
Operation
Number of Pockets

1

Water Cooling

internal

E-beam power

400 W

Operating Pressure

< 10-10 - 10-5 mbar

Optional Accessories

Non standard lengths 

Mounting
Mounting Flange

NW35CF (2.75 ")

Insertion Depth

210 mm

Max. Rod Feed

50 mm

Max. Crucible Size

0.25 cc

Power Supply

400 W

Shutter

Motorized shutter

DOWNLOADS

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