EQ 22/35 Electron Source

The EQ 22/35 is a Small Spot, Scannable Electron Source Designed for Stable and Reliable Operation at High Electron Currents.

This source can be used for almost any application which requires an focused electron beam. Among the popular applications are Auger Electron Spectroscopy (AES), scanning imaging applications (SAM/SEM), electron energy loss spectroscopy (EELS), or electron pulse applications such as desorption (ESD) experiments. Due to the high transmission of its Einzel-lens, the EQ 22/35 is an electron source which gives high electron beam currents over a wide energy range.

Special features such as key stone correction for keeping the spot size and shape constant during scanning operation, integrated pulse mode, a wide scan area and the extremely high stability power supply make it an easy to use choice for almost any kind of vacuum experiment involving electron beams.

KEY FEATURES

Wide energy range
High electron current
Small spot size
Integrated beam deflection
Key stone correction
Optional pulse mode

MADE FOR THESE METHODS
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MADE FOR THESE METHODS

3

AES, SAM, SEM

Auger electron spectroscopy/microscopy detects the energy distribution of secondary electrons returning from a surface locally for chemical analysis.

IPES, BIS

Inverse Photoelectron Spectroscopy or Bremsstrahlung Isochromate Spectroscopy is a laboratory-based method to analyze unoccupied states

(R)EELS

In Reflection Electron Energy Loss Scattering (REELS) the inelastically scattered electrons from a surface are detected for their loss energies

SPECIFICATIONS

EQ 22/35 Electron Source

Operation

Electron Current	> 100 μA
Electron Energy	20 eV - 5 keV
Scannable	yes
Applications	AES, SEM, SAM, REELS
Optional Accessories	Microformed filament (LaB6) Pulsed operation with beam chopper