DetailEBE-4 Configurable
Multi-Pocket Electron Beam Evaporator for Deposition of Thin Metal Films with Highest Purity for Various Surface Science Applications.
The configurable SPECS EBE-4 is a combined, fully UHV compatible multipocket mini e-beam evaporator which is capable of evaporating small quantities of almost any material. The material (either from crucible or rod form) is heated by eletron bombardment from a surrounding filament reaching temperatures above 3000 K.
Up to 4 pockets can be fitted with a fixed-length holder or a linear drive which allows a rod feed of up to 25 mm or can be upgraded by the user later on. All pockets may be used individually or in any combination for true co-evaporation. The instrument is therefore highly flexible and well suited to a wide range of surface science applications.
In combination with the EBE-M Power Supply, which can run every pocket individually or in any combination with the other pockets, EBE-4 allows an optimal evaporation and co-evaporation process by controlling filament current and regulating emission and flux current.
SPECIFICATIONS
| Number of Pockets | 4 |
| Water Cooling | internal |
| E-beam power | 300 W |
| Operating Pressure | < 10-10 - 10-5 mbar |
| Optional Accessories | Crucible or rod Linear motion holder Fixed holder Flexible pocket configuration (number and motion) Ion Trap |
| Operating temperature | above 3000 K |
| Mounting Flange | DN40CF (2.75 ") |
| Insertion Depth | 231 mm |
| Max. Rod Diameter | 34 mm |
| Max. Rod Feed | Up to 25 mm |
| Max. Crucible Size | 0.07 cc |
| Power Supply | EBE-M |
| Shutter | Special shaped motorized shutter |
SPARE PARTS
Crucible EBE-4-C-C for electron beam evaporator EBE-4. Material: Pyrolytic Graphite. Volume: 0,07 cc
Crucible EBE-4-C-Mo for electron beam evaporator EBE-4. Material: Molybdenum. Volume: 0,07 cc
Crucible EBE-4-C-Ta for electron beam evaporator EBE-4. Material: Tantalum. Volume: 0,07 cc
Crucible EBE-4-C-VC for electron beam evaporator EBE-4. Material: Vitreous Carbon. Volume: 0,07 cc
Crucible EBE-4-C-W for electron beam evaporator EBE-4. Material: Tungsten. Volume: 0,07 cc
Crucible Insert EBE-4-CI-Al2O3 Aluminum oxide for electron beam evaporator EBE-4
Crucible Insert EBE-4-CI-BN Bornitrit for electron beam evaporator EBE-4
Crucible with end cap EBE-4-EC-C pyrolytic Carbon for electron beam evaporator EBE-4
Crucible with end cap EBE-4-EC-Mo Molybdenum for electron beam evaporator EBE-4
Crucible with end cap EBE-4-EC-Ta Tantalum for electron beam evaporator EBE-4
Crucible with end cap EBE-4-EC-W Tungsten for electron beam evaporator EBE-4
Crucible with welded end cap EBE-4-EC-Mo Molybdenum for electron beam evaporator EBE-4
Crucible with welded end cap EBE-4-EC-Ta Tantalum for electron beam evaporator EBE-4
Crucible with welded end cap EBE-4-EC-W Tungsten for electron beam evaporator EBE-4
End cap EBE-4 C-BN Bornitrit
End cap EBE-4 C-Ta Tantalum
Rodholder EBE-4-RH3 for electron beam evaporator EBE-4 for 3 mm rods including screws
End cap EBE-4 EC-W Tungsten
Replacement filament for EBE-4
Filament isolator ceramics Al2O3 for EBE-4
End cap EBE-4 C-Mo Molybdenum
Rodholder EBE-4-RH2 for electron beam evaporator EBE-4 for 2 mm rods including screws
Rodholder EBE-4-RH4 for electron beam evaporator EBE-4 for 4 mm rods including screws
