Detail
Differential Pumping for UVS 10/35
Differential Pumping System for SPECS UVS 10/35 UV Light Source
Efficient pumping system for the SPECS UVS 10/35 operation in low 10-6 to 10-8 mbar region. A turbo molecular pump with 67 l/s is attached to the UV souorce and connected to a rough pump system.
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