µFOCUS 450

The µFOCUS 450 monochromator is equipped with microfocus high performance X-ray source XR MC which is specially designed for the use with the monochromator. This small spot source is equipped with Al anode in the standard configuration and two upgradable higher energies anodes (Ag, and Cr) for HAXPES capabilities. The µFOCUS 450 monochromator together with the XR MC microfocus X-ray source is perfectly suited for small spot, high resolution and high intensity XPS measurements. The X-ray monochromator operates according to Bragg´s Law of X-ray diffraction. Each wavelength of X-rays (Al K_α, Ag L_α, Cr K_α) is reflected from individually optimized crystals at a specific angle of reflection. For the Al anode, a quartz crystal is used, which has a 450 mm Rowland circle diameter, whereas for Ag and Cr two different oriented germanium crystals are used, which have 416 and 676 mm Rowland circles respectively. Due to its overall compactness, the µFOCUS 450 is suitable for mounting on almost any analysis chambers as a bolt-on component. Furthermore, being already equipped with a Si₃N₄ window, by using the differentially pumped NAP extension, the µFOCUS 450 allows to carry out XPS measurements under gas atmospheres of up to 50 mbar.