EBE-M

The SPECS EBE-M is a highly reliable analogue power supply for EBE-4 multi-pocket e-beam evaporator. The power supply is designed to operate up to four pockets in either sequential evaporation or simultaneous co-evaporation and to control emission current, filament current or flux for each pocket individually. With the specially shaped motorized shutter that provides various combinations of open and closed pockets, true coevaporation of different materials as well as programmed deposition of multilayer structures is possible. The parameters can be accessed via the intelligent front plate of the instrument or by remote control via ethernet. Each source can be operated in a range of zero to 300 Watts with the power required depending upon the material. The power supply includes independent filament supplies for each pocket (4 in total) and a common HV supply. The electronics allows all four pockets to operate simlutanously in co-evaporation mode and in conjunction with the appropriate monitoring, where the maximumtotal  power for all 4 pockets is 400W.