DetailIntegrated System with Distribution
The integration of several analysis modules, preparation chambers and/or deposition satellites is a challenge in a standard multimethod system. In such cases the use of a radial (for smaller clusters of system modules) or linear distribution chambers (for a larger number of modules) is easier to design, to built and to use. The reliability and servicability of such system is also superior, also leading to higher uptimes. So in the end the investment in such a distribution chamber pays easily back after a few years. Especially, when changes in the research program or materials combination are necessary. In this case such a system can be adapted in an affordable manner, while a tailor-made multimethod system might not be usable any longer.
Integrated System with Distribution