Detail

COSCON SIS

Power supply for the focussing and scanning ion source IQE 12/38, designed for automated operation and full integration into SpecsLab Prodigy

The COSCON SIS is a fully digital power supply for the scanning ion source IQE 12/38. It allows for fast and precise scanning of the ion beam with up to 5 keV and up to 10 mA. It is fully integrated into the SpecsLab Prodigy acqisiton and evaluation software and can furthermore be controlled by its own web interface from any mobile device. Due to its possibility of sample current read back, imaging and highly precise and reproducible spectroscopy and sputter depth profiling application is possible. Auxilliary input ports on the scanning module allows for application of external scan generators for customized scanning patterns.

KEY FEATURES

full integration into SpecsLab Prodigy
ion energy selectable upt ot 5 keV
ion current up to 10 mA
low ripple electronics for high precision
integrated scanning and deflecting unit
read back of sample current for imaging capabilities

MADE FOR THESE METHODS
SPECIFICATIONS
RELATED PRODUCTS

MADE FOR THESE METHODS

2

Sputter Depth Profiling

Film Thicknesses of multilayer samples and the depth distribution of elements can be characterized by sputter depth profiling.

Low Energy Ion Scattering Spectroscopy (LEISS) is the most surface sensitive method for chemical analysis. Only the topmost layer is probed.

SPECIFICATIONS

COSCON SIS

Performance

Ion Energy	0.5 - 5 keV
Emission current	0.01 - 10 mA
X and Y deflection voltage	+ / - 650 V

RELATED PRODUCTS

5

COSCON LSIS

Power supply for IQE 12 LE

COSCON WSIS

Power Supply for IQE 12/38 ion source with Wien mass filter

Extractor Type Low Energy Ion Source

Extractor Type Scannable Ion Source

IQE 12/38 Wien Filter

IQE 12/38 Wien Filter (4800 and 1000 Gauss) + Power Supply

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